Issued Patents All Time
Showing 76–90 of 90 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7928011 | Method for structuring a substrate using a metal mask layer formed using a galvanization process | Michael Sebald | 2011-04-19 |
| 7793550 | Sensor device including two sensors embedded in a mold material | Albert Auburger | 2010-09-14 |
| 7462442 | Biocompatible microchip and a method for producing the same | — | 2008-12-09 |
| 7374858 | Polymerizable compositions; polymer, resist, and lithography method | — | 2008-05-20 |
| 7351518 | Composition which forms an electrically conductive resist layer and a method for patterning a photoresist using the resist layer | Rafael Abargues | 2008-04-01 |
| 7220531 | Resist for electron beam lithography and a process for producing photomasks using electron beam lithography | Michael Sebald | 2007-05-22 |
| 7160670 | Resist for forming a structure for aligning an electron or ion beam and technique for forming the structure | — | 2007-01-09 |
| 7157189 | Lithographic process for reducing the lateral chromium structure loss in photomask production using chemically amplified resists | Michael Sebald | 2007-01-02 |
| 7125653 | Method of producing conductive or semiconducting structured polymers | — | 2006-10-24 |
| 7005220 | Method for structuring a lithography mask | Armelle Vix | 2006-02-28 |
| 6821706 | Polymerizable composition, polymer, resist, and process for electron beam lithography | Rafael Abargues | 2004-11-23 |
| 6703190 | Method for producing resist structures | Stefan Hien, Ernst-Christian Richter, Michael Sebald | 2004-03-09 |
| 6686131 | Method of producing biocompatible structures and biocompatible microchip | — | 2004-02-03 |
| 6251558 | Chemically amplified resist | Rainer Leuschner, Ewald Guenther | 2001-06-26 |
| 6171755 | Chemically amplified resist | Ewald Karl Michael Günther, Rainer Leuschner | 2001-01-09 |