Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7351518 | Composition which forms an electrically conductive resist layer and a method for patterning a photoresist using the resist layer | Klaus Elian | 2008-04-01 |
| 6821706 | Polymerizable composition, polymer, resist, and process for electron beam lithography | Klaus Elian | 2004-11-23 |