Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11890950 | System having an electric consumer | Rico Henkel, Martin Bund, Mario Epp | 2024-02-06 |
| 6703190 | Method for producing resist structures | Klaus Elian, Ernst-Christian Richter, Michael Sebald | 2004-03-09 |
| 6514663 | Bottom resist | Michael Sebald | 2003-02-04 |
| 6306990 | Film-forming polymers | Michael Sebald | 2001-10-23 |
| 6063543 | Radiation-sensitive mixture and its use | Michael Sebald | 2000-05-16 |