Issued Patents All Time
Showing 126–150 of 159 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9362853 | Plate, transducer and methods for making and operating a transducer | — | 2016-06-07 |
| 9309105 | Sensor structure for sensing pressure waves and ambient pressure | Roland Helm | 2016-04-12 |
| 9227843 | Methods of manufacturing a MEMS device having a backplate with elongated protrusions | — | 2016-01-05 |
| 9181080 | MEMS microphone with low pressure region between diaphragm and counter electrode | Andreas Froemel | 2015-11-10 |
| 9148712 | Micromechanical digital loudspeaker | — | 2015-09-29 |
| 9148726 | Micro electrical mechanical system with bending deflection of backplate structure | — | 2015-09-29 |
| 9102519 | Semiconductor devices and methods of forming thereof | Carsten Ahrens, Stefan Barzen, Wolfgang Friza | 2015-08-11 |
| 9090453 | Sensor module and semiconductor chip | Marc Fueldner | 2015-07-28 |
| 9061896 | Method for manufacturing a MEMS device and MEMS device | Christoph Glacer, Soenke Pirk | 2015-06-23 |
| 9031266 | Electrostatic loudspeaker with membrane performing out-of-plane displacement | Mohsin Nawaz, Christoph Glacer | 2015-05-12 |
| 9024396 | Device with MEMS structure and ventilation path in support structure | — | 2015-05-05 |
| 9006845 | MEMS device with polymer layer, system of a MEMS device with a polymer layer, method of making a MEMS device with a polymer layer | — | 2015-04-14 |
| 9002037 | MEMS structure with adjustable ventilation openings | Matthias Herrmann, Ulrich Krumbein, Stefan Barzen, Wolfgang Klein, Wolfgang Friza +1 more | 2015-04-07 |
| 8983097 | Adjustable ventilation openings in MEMS structures | Martin Wurzer | 2015-03-17 |
| 8975107 | Method of manufacturing a semiconductor device comprising a membrane over a substrate by forming a plurality of features using local oxidation regions | Stefan Barzen, Wolfgang Friza, Wolfgang Klein | 2015-03-10 |
| 8921956 | MEMS device having a back plate with elongated protrusions | — | 2014-12-30 |
| 8737674 | Housed loudspeaker array | — | 2014-05-27 |
| 8723277 | Tunable MEMS device and method of making a tunable MEMS device | Martin Wurzer, Christian Herzum, Wolfgang Klein, Stefan Barzen | 2014-05-13 |
| 8604566 | Sensor module and semiconductor chip | Marc Fueldner | 2013-12-10 |
| 8542853 | Sound transducer structure and method for manufacturing a sound transducer structure | Stefan Barzen, Marc Fueldner | 2013-09-24 |
| 8503699 | Plate, transducer and methods for making and operating a transducer | — | 2013-08-06 |
| 8497558 | System and method for wafer level packaging | Ulrich Krumbein, Gerhard Lohninger | 2013-07-30 |
| 8461655 | Micromechanical sound transducer having a membrane support with tapered surface | Wolfgang Klein, Uwe Seidel, Stefan Barzen, Mohsin Nawaz, Wolfgang Friza +1 more | 2013-06-11 |
| 8428286 | MEMS microphone packaging and MEMS microphone module | Marc Fueldner, Martin Wurzer | 2013-04-23 |
| 7994618 | Sensor module and method for manufacturing same | Marc Fueldner | 2011-08-09 |