Issued Patents All Time
Showing 26–50 of 159 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10913656 | Method for sealing an access opening to a cavity and MEMS component comprising a sealing element | Gerhard Metzger-Brueckl, Uwe Hoeckele, Johann Strasser, Arnaud Walther | 2021-02-09 |
| 10880629 | Device for detecting acoustic waves | David Tumpold, Gueclue Onaran | 2020-12-29 |
| 10829368 | MEMS device and method of manufacturing a MEMS device | Stephan Pindl, Bernhard Knott, Carsten Ahrens | 2020-11-10 |
| 10830691 | Fluid sensor and method for providing same | Christoph Glacer, David Tumpold | 2020-11-10 |
| 10779101 | MEMS device | Stefan Barzen | 2020-09-15 |
| 10761005 | Apparatus for analysing the particulate matter content of an aerosol | Christian Bretthauer | 2020-09-01 |
| 10753858 | Wafer arrangement | Stefan Kolb, Jochen Huber, Franz Jost, Horst Theuss, Wilhelm Wiedmeier +1 more | 2020-08-25 |
| 10737935 | MEMS sensors, methods for providing same and method for operating a MEMS sensor | Marc Fueldner, Andreas Wiesbauer | 2020-08-11 |
| 10715930 | System and method for an optical MEMS transducer | Ulf Bartl | 2020-07-14 |
| 10689250 | MEMS component and production method for a MEMS component | Marc Fueldner, Stefan Barzen, Gunar Lorenz | 2020-06-23 |
| 10684163 | Acoustic wave sensor | Manuel Dorfmeister, Ulrich Schmid, Michael Schneider | 2020-06-16 |
| 10676346 | MEMS component and production method for a MEMS component | Arnaud Walther, Gerhard Metzger-Brueckl, Johann Strasser | 2020-06-09 |
| 10669151 | Double-membrane MEMS component and production method for a double-membrane MEMS component | Johann Strasser, Gerhard Metzger-Brueckl, Juergen Wagner, Arnaud Walther | 2020-06-02 |
| 10641626 | MEMS sensors, methods for providing same and method for measuring a fluid constituent | Christian Bretthauer, Prashanth Makaram, Abidin Güçlü Onaran, Arnaud Walther | 2020-05-05 |
| 10626007 | Microelectromechanical transducer | Christian Bretthauer, Alfred Sigl | 2020-04-21 |
| 10602290 | MEMS device | Stefan Barzen | 2020-03-24 |
| 10589990 | MEMS microphone | Ulrich Krumbein, Gerhard Metzger-Brueckl, Johann Strasser, Juergen Wagner, Arnaud Walther | 2020-03-17 |
| 10582306 | Capacitive MEMS device, capacitive MEMS sound transducer, method for forming a capacitive MEMS device, and method for operating a capacitive MEMS device | — | 2020-03-03 |
| 10582304 | Diaphragm element arrangement and related method | Manuel Dorfmeister, Ulrich Schmid, Michael Schneider | 2020-03-03 |
| 10575101 | Microelectromechanical microphone | Arnaud Walther, Gerhard Metzger-Brueckl, Johann Strasser, Carsten Ahrens | 2020-02-25 |
| 10567886 | Sound transducer structure and method for manufacturing a sound transducer structure | Stefan Barzen, Marc Fueldner | 2020-02-18 |
| 10560771 | Microelectromechanical microphone | Gerhard Metzger-Brueckl, Johann Strasser, Arnaud Walther, Andreas Wiesbauer | 2020-02-11 |
| 10546752 | System and method for a transducer in an eWLB package | Stephan Pindl, Daniel Lugauer, Dominic Maier | 2020-01-28 |
| 10527589 | Apparatus and method for in-situ calibration of a photoacoustic sensor | Stefan Kolb, Jochen Huber, Franz Jost, Horst Theuss, Juergen Woellenstein | 2020-01-07 |
| 10516943 | Microelectromechanical device, an array of microelectromechanical devices, a method of manufacturing a microelectromechanical device, and a method of operating a microelectromechanical device | Manuel Dorfmeister, Michael Schneider, Manfred Kaltenbacher, Ursula Hedenig, Thomas Grille +1 more | 2019-12-24 |