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Mask layout formation |
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2014-10-28 |
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Generating cut mask for double-patterning process |
Henning Haffner, Scott M. Mansfield |
2013-01-29 |
| 8181126 |
Differential alternating phase shift mask optimization |
Lars Liebmann |
2012-05-15 |
| 8039203 |
Integrated circuits and methods of design and manufacture thereof |
Helen Wang, Scott D. Halle, Henning Haffner, Haoren Zhuang, Klaus Herold +4 more |
2011-10-18 |
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Local coloring for hierarchical OPC |
Ioana Graur, Lars Liebmann, Scott M. Mansfield |
2010-01-19 |
| 7617473 |
Differential alternating phase shift mask optimization |
Lars Liebmann |
2009-11-10 |
| 7229722 |
Alternating phase shift mask design for high performance circuitry |
Lars Liebmann |
2007-06-12 |
| 7043712 |
Method for adaptive segment refinement in optical proximity correction |
Maharaj Mukherjee, Mark A. Lavin, Donald J. Samuels, Rama N. Singh |
2006-05-09 |
