Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10095115 | Forming edge etch protection using dual layer of positive-negative tone resists | Christopher B. Shing, Joyce C. Liu, Richard D. Kaplan, Darius Brown | 2018-10-09 |
| 8039366 | Method for providing rotationally symmetric alignment marks for an alignment system that requires asymmetric geometric layout | Karen L. Holloway, Holly LaFerrara, Alexander L. Martin, Martin E. Powell, Roger J. Yerdon | 2011-10-18 |
| 6660456 | Technique for the size reduction of vias and other images in semiconductor chips | — | 2003-12-09 |
| 6436595 | Method of aligning lithographically printed product layers using non-zero overlay targets | Santo Credendino | 2002-08-20 |
| 6396160 | Fill strategies in the optical kerf | Steffen Schulze, Kathryn H. Varian | 2002-05-28 |
| 5877861 | Method for overlay control system | Christopher P. Ausschnitt | 1999-03-02 |