Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797582 | Vertical thermal nitride mask (anti-collar) and processing thereof | Oleg Gluschenkov, Michael P. Chudzik, Rajarao Jammy, Christopher C. Parks, Kenneth T. Settlemyer, Jr. +1 more | 2004-09-28 |
| 6396160 | Fill strategies in the optical kerf | Steffen Schulze, Timothy J. Wiltshire | 2002-05-28 |
| 6001740 | Planarization of a non-conformal device layer in semiconductor fabrication | Dirk Tobben, Matthew Sendelbach | 1999-12-14 |
| 5916010 | CMP pad maintenance apparatus and method | James T. Varian | 1999-06-29 |
| 5880007 | Planarization of a non-conformal device layer in semiconductor fabrication | Dirk Tobben, Matthew Sendelbach | 1999-03-09 |