Issued Patents All Time
Showing 51–58 of 58 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5805290 | Method of optical metrology of unresolved pattern arrays | Christopher P. Ausschnitt | 1998-09-08 |
| 5675164 | High performance multi-mesa field effect transistor | Louis L. Hsu, Jack A. Mandelman, Li-Kong Wang | 1997-10-07 |
| 5532089 | Simplified fabrication methods for rim phase-shift masks | William J. Adair, Derek B. Dove, Louis L. Hsu, Chi-Min Yuan | 1996-07-02 |
| 5470681 | Phase shift mask using liquid phase oxide deposition | Derek B. Dove, Louis L. Hsu | 1995-11-28 |
| 5300786 | Optical focus phase shift test pattern, monitoring system and process | Michael S. Hibbs, Barbara Bates Peck, Chrisopher A. Spence | 1994-04-05 |
| 4929083 | Focus and overlay characterization and optimization for photolithographic exposure | — | 1990-05-29 |
| 4703434 | Apparatus for measuring overlay error | — | 1987-10-27 |
| 4475811 | Overlay test measurement systems | — | 1984-10-09 |