Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7094614 | In-situ monitoring of chemical vapor deposition process by mass spectrometry | Douglas S. Armbrust, John Baker, Arne Ballantine, Doreen D. DiMilia, Mark L. Reath +1 more | 2006-08-22 |
| 6420263 | Method for controlling extrusions in aluminum metal lines and the device formed therefrom | George A. Dunbar, III, Robert M. Geffken, William J. Murphy, Prabhat Tiwari, David H. Yao | 2002-07-16 |
| 6254719 | Method for controlled removal of material from a solid surface | — | 2001-07-03 |
| 6022485 | Method for controlled removal of material from a solid surface | — | 2000-02-08 |
| 5913713 | CMP polishing pad backside modifications for advantageous polishing results | John Cronin, Douglas P. Nadeau, Matthew J. Rutten, Terrance M. Wright | 1999-06-22 |