Issued Patents All Time
Showing 76–78 of 78 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9171796 | Sidewall image transfer for heavy metal patterning in integrated circuits | Michael A. Guillorn, Mark Hoinkis, Eric A. Joseph, Hiroyuki Miyazoe, Bang N. To | 2015-10-27 |
| 9053982 | Local tailoring of fingers in multi-finger fin field effect transistors | Josephine B. Chang, Michael A. Guillorn, HsinYu Tsai | 2015-06-09 |
| 8916054 | High fidelity patterning employing a fluorohydrocarbon-containing polymer | Sebastian U. Engelmann, Nicholas C. M. Fuller, Michael A. Guillorn, Hiroyuki Miyazoe, Masahiro Nakamura | 2014-12-23 |