Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6584989 | Apparatus and method for wet cleaning | Charles J. Taft, Kenneth McCullough, David L. Rath, Robert W. Zigner, Jr. | 2003-07-01 |
| 6354309 | Process for treating a semiconductor substrate | Russell H. Arndt, Glenn W. Gale, Frederick William Kern, Jr., Karen P. Madden, Harald Okorn-Schmidt +2 more | 2002-03-12 |
| 6178973 | Method and apparatus for ozone generation and surface treatment | Daniel L. Franca, Uldis A. Ziemins | 2001-01-30 |
| 6173720 | Process for treating a semiconductor substrate | Russell H. Arndt, Glenn W. Gale, Frederick William Kern, Jr., Karen P. Madden, Harald Okorn-Schmidt +2 more | 2001-01-16 |
| 6060388 | Conductors for microelectronic circuits and method of manufacture | Hiroyuki Akatsu, Russell H. Arndt, Bradley P. Jones | 2000-05-09 |
| 5780363 | Etching composition and use thereof | Donald J. Delehanty, Rangarajan Jagannathan, Kenneth McCullough, Donna Diane Miura, David L. Rath +2 more | 1998-07-14 |