Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6343974 | Real-time method for profiling and conditioning chemical-mechanical polishing pads | Raymond M. Khoury, Jose M. Ocasio, Uldis A. Ziemins | 2002-02-05 |
| 6217422 | Light energy cleaning of polishing pads | Raymond M. Khoury, Jose M. Ocasio, Uldis A. Ziemins | 2001-04-17 |
| 6178973 | Method and apparatus for ozone generation and surface treatment | George F. Ouimet, Uldis A. Ziemins | 2001-01-30 |