Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6924200 | Methods using disposable and permanent films for diffusion and implantation doping | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, William H. Ma +1 more | 2005-08-02 |
| 6670624 | Ion implanter in-situ mass spectrometer | Edward D. Adams, Edward P. Lowe, Jr., Nicholas Mone, Jr., Richard S. Ray | 2003-12-30 |
| 6576909 | Ion generation chamber | Gary A. Donaldson, Nick G. Selva | 2003-06-10 |
| 6559462 | Method to reduce downtime while implanting GeF4 | Nicole S. Carpenter, Robert E. Fields, Nicholas Mone, Jr., Gary Michael Prescott, Richard S. Ray | 2003-05-06 |
| 6514840 | Micro heating of selective regions | Howard T. Barrett, Toshiharu Furukawa, James A. Slinkman | 2003-02-04 |
| 6506653 | Method using disposable and permanent films for diffusion and implant doping | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, William H. Ma +1 more | 2003-01-14 |
| 6333245 | Method for introducing dopants into semiconductor devices using a germanium oxide sacrificial layer | Toshiharu Furukawa, Mark C. Hakey, Steven J. Holmes, David V. Horak, William H. Ma | 2001-12-25 |
| 5510295 | Method for lowering the phase transformation temperature of a metal silicide | Cyril Cabral, Jr., Lawrence A. Clevenger, Francois M. d'Heurle, James M. E. Harper, Randy W. Mann +1 more | 1996-04-23 |