| 6187679 |
Low temperature formation of low resistivity titanium silicide |
Cyril Cabral, Jr., Lawrence A. Clevenger, James M. E. Harper, Randy W. Mann, Glen L. Miles +3 more |
2001-02-13 |
| 5945737 |
Thin film or solder ball including a metal and an oxide, nitride, or carbide precipitate of an expandable or contractible element |
Cyril Cabral, Jr., Lawrence A. Clevenger, Qi-Zhong Hong |
1999-08-31 |
| 5834374 |
Method for controlling tensile and compressive stresses and mechanical problems in thin films on substrates |
Cyril Cabral, Jr., Lawrence A. Clevenger, Qi-Zhong Hong |
1998-11-10 |
| 5828131 |
Low temperature formation of low resistivity titanium silicide |
Cyril Cabral, Jr., Lawrence A. Clevenger, James M. E. Harper, Randy W. Mann, Glen L. Miles +3 more |
1998-10-27 |
| 5624869 |
Method of forming a film for a multilayer Semiconductor device for improving thermal stability of cobalt silicide using platinum or nitrogen |
Paul D. Agnello, Cyril Cabral, Jr., Lawrence A. Clevenger, Matthew W. Copel, Qi-Zhong Hong |
1997-04-29 |
| 5608266 |
Thin film for a multilayer semiconductor device for improving thermal stability and a method thereof |
Paul D. Agnello, Cyril Cabral, Jr., Lawrence A. Clevenger, Matthew W. Copel, Qi-Zong Hong |
1997-03-04 |
| 5510295 |
Method for lowering the phase transformation temperature of a metal silicide |
Cyril Cabral, Jr., Lawrence A. Clevenger, James M. E. Harper, Randy W. Mann, Glen L. Miles +1 more |
1996-04-23 |
| 5143867 |
Method for depositing interconnection metallurgy using low temperature alloy processes |
James M. E. Harper |
1992-09-01 |
