Issued Patents All Time
Showing 51–63 of 63 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5965309 | Focus or exposure dose parameter control system using tone reversing patterns | Timothy A. Brunner, Mark E. Lagus | 1999-10-12 |
| 5953128 | Optically measurable serpentine edge tone reversed targets | Timothy A. Brunner, Alan C. Thomas | 1999-09-14 |
| 5914784 | Measurement method for linewidth metrology | Timothy A. Brunner | 1999-06-22 |
| 5877861 | Method for overlay control system | Timothy J. Wiltshire | 1999-03-02 |
| 5805290 | Method of optical metrology of unresolved pattern arrays | Timothy A. Brunner | 1998-09-08 |
| 5790254 | Monitoring of minimum features on a substrate | — | 1998-08-04 |
| 5757507 | Method of measuring bias and edge overlay error for sub-0.5 micron ground rules | William A. Muth | 1998-05-26 |
| 5731877 | Automated system utilizing self-labeled target by pitch encoding | — | 1998-03-24 |
| 5712707 | Edge overlay measurement target for sub-0.5 micron ground rules | William A. Muth | 1998-01-27 |
| 5629772 | Monitoring of minimum features on a substrate | — | 1997-05-13 |
| 4890239 | Lithographic process analysis and control system | Edward A. McFadden, Raul V. Tan | 1989-12-26 |
| 4538105 | Overlay test wafer | — | 1985-08-27 |
| 4290384 | Coating apparatus | David A. Huchital | 1981-09-22 |