Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7867910 | Method of accessing semiconductor circuits from the backside using ion-beam and gas-etch | George Y. Gu, Loren L. Hahn, Steven B. Herschbein | 2011-01-11 |
| 7205237 | Apparatus and method for selected site backside unlayering of si, GaAs, GaxAlyAszof SOI technologies for scanning probe microscopy and atomic force probing characterization | Andrew Deering, Terence L. Kane, Philip V. Kaszuba, Leon Moszkowicz, Michael P. Tenney | 2007-04-17 |
| 6900137 | Dry etch process to edit copper lines | Steven B. Herschbein, Ville S. Kiiskinen, Chad Rue, Michael Sievers | 2005-05-31 |