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| 7507591 |
Methods of measurement and preparation of measurement structure of integrated circuit |
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Apparatus and method for selected site backside unlayering of si, GaAs, GaxAlyAszof SOI technologies for scanning probe microscopy and atomic force probing characterization |
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Silicided silicon microtips for scanning probe microscopy |
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2001-03-06 |
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Method of manufacturing silicided silicon microtips for scanning probe microscopy |
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2000-10-31 |
