Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9726969 | Reflective mask blank, method of manufacturing same, reflective mask and method of manufacturing semiconductor device | Tatsuo Asakawa, Tsutomu Shoki | 2017-08-08 |
| 9720315 | Reflective mask blank, method of manufacturing reflective mask blank, reflective mask and method of manufacturing semiconductor device | Tatsuo Asakawa, Tsutomu Shoki | 2017-08-01 |
| 9581895 | Mask blank substrate, substrate with multilayer reflective film, reflective mask blank, reflective mask, method of manufacturing mask blank substrate, method of manufacturing substrate with reflective film and method of manufacturing semiconductor device | Toshihiko Orihara, Tsutomu Shoki, Junichi Horikawa | 2017-02-28 |
| 9535318 | Reflective mask blank and method for manufacturing same, method for manufacturing reflective mask, and method for manufacturing semiconductor device | Tatsuo Asakawa, Osamu Maruyama, Tsutomu Shoki | 2017-01-03 |
| 9507254 | Method of manufacturing substrate with a multilayer reflective film, method of manufacturing a reflective mask blank, substrate with a multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing a semiconductor device | Toshihiko Orihara, Hirofumi Kozakai, Tsutomu Shoki, Junichi Horikawa | 2016-11-29 |
| 9494851 | Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask, and semiconductor device fabrication method | Toshihiko Orihara, Hirofumi Kozakai, Youichi Usui, Tsutomu Shoki, Junichi Horikawa | 2016-11-15 |
| 9423685 | Multilayer reflective film formed substrate, reflective mask blank, mask blank, methods of manufacturing the same, reflective mask, and mask | Tsutomu Shoki | 2016-08-23 |
| 9377679 | Reflective mask blank and method for manufacturing same, method for manufacturing reflective mask, and method for manufacturing semiconductor device | Tatsuo Asakawa, Osamu Maruyama, Tsutomu Shoki | 2016-06-28 |
| 9348217 | Mask blank substrate, substrate with multilayer reflection film, transmissive mask blank, reflective mask blank, transmissive mask, reflective mask, and semiconductor device fabrication method | Toshihiko Orihara, Hirofumi Kozakai, Youichi Usui, Tsutomu Shoki, Junichi Horikawa | 2016-05-24 |
| 9323141 | Method for producing substrate with multilayer reflective film, method for producing reflective mask blank and method for producing reflective mask | Tsutomu Shoki | 2016-04-26 |
| 9229316 | Method for producing substrate with multilayer reflective film, method for producing reflective mask blank and method for producing reflective mask | Tsutomu Shoki | 2016-01-05 |
| 7553769 | Method for treating a dielectric film | Dorel I. Toma, Jianhong Zhu | 2009-06-30 |
| 6218277 | Method for filling a via opening or contact opening in an integrated circuit | — | 2001-04-17 |
| 5946591 | Method of making a semiconductor device having a flat surface | Shigeo Ashigaki | 1999-08-31 |
| 5872060 | Semiconductor device manufacturing method | Shigeo Ashigaki | 1999-02-16 |