Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10996554 | Substrate with an electrically conductive film, substrate with a multilayer reflective film, reflective mask blank, reflective mask and method of manufacturing semiconductor device | Takumi Kobayashi, Kazuhiro Hamamoto, Tsutomu Shoki | 2021-05-04 |
| 10606166 | Substrate with electrically conductive film, substrate with multilayer reflective film, reflective mask blank, reflective mask, and method of manufacturing semiconductor device | Takumi Kobayashi, Kazuhiro Hamamoto, Tsutomu Shoki | 2020-03-31 |
| 10347485 | Reflective mask blank, method for manufacturing same, reflective mask, method for manufacturing same, and method for manufacturing semiconductor device | Tsutomu Shoki, Hirofumi Kozakai | 2019-07-09 |
| 10191365 | Reflective mask blank, method of manufacturing reflective mask blank, reflective mask and method of manufacturing semiconductor device | Kazuhiro Hamamoto, Tsutomu Shoki | 2019-01-29 |
| 9726969 | Reflective mask blank, method of manufacturing same, reflective mask and method of manufacturing semiconductor device | Kazuhiro Hamamoto, Tsutomu Shoki | 2017-08-08 |
| 9720315 | Reflective mask blank, method of manufacturing reflective mask blank, reflective mask and method of manufacturing semiconductor device | Kazuhiro Hamamoto, Tsutomu Shoki | 2017-08-01 |
| 9535318 | Reflective mask blank and method for manufacturing same, method for manufacturing reflective mask, and method for manufacturing semiconductor device | Kazuhiro Hamamoto, Osamu Maruyama, Tsutomu Shoki | 2017-01-03 |
| 9377679 | Reflective mask blank and method for manufacturing same, method for manufacturing reflective mask, and method for manufacturing semiconductor device | Kazuhiro Hamamoto, Osamu Maruyama, Tsutomu Shoki | 2016-06-28 |