Issued Patents All Time
Showing 51–68 of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5113072 | Device having superlattice structure, and method of and apparatus for manufacturing the same | Hiroshi Yamaguchi, Keiya Saito, Fumikazu Itoh, Koji Ishida, Shinji Sakano +3 more | 1992-05-12 |
| 5065034 | Charged particle beam apparatus | Yoshimi Kawanami, Tsuyoshi Ohnishi, Tooru Habu, Masahiro Yamaoka | 1991-11-12 |
| 4983540 | Method of manufacturing devices having superlattice structures | Hiroshi Yamaguchi, Keiya Saito, Fumikazu Itoh, Koji Ishida, Shinji Sakano +3 more | 1991-01-08 |
| 4939364 | Specimen or substrate cutting method using focused charged particle beam and secondary ion spectroscopic analysis method utilizing the cutting method | Tsuyoshi Ohnishi, Yoshimi Kawanami | 1990-07-03 |
| 4936968 | Ion-beam machining method and apparatus | Tsuyoshi Ohnishi, Yoshimi Kawanami | 1990-06-26 |
| 4900974 | Ion source | Hideo Todokoro, Hifumi Tamura | 1990-02-13 |
| 4774414 | Liquid metal ion source | Kaoru Umemura, Toshiyuki Aida, Hifumi Tamura | 1988-09-27 |
| 4755685 | Ion micro beam apparatus | Yoshimi Kawanami, Kaoru Umemura, Hifumi Tamura | 1988-07-05 |
| 4733134 | Liquid metal ion source with pulse generator control | Hifumi Tamura, Kaoru Umemura, Yoshimi Kawanami | 1988-03-22 |
| 4710632 | Ion microbeam apparatus | Hideo Todokoro, Yoshimi Kawanami, Hifumi Tamura | 1987-12-01 |
| 4697086 | Apparatus for implanting ion microbeam | Hifumi Tamura, Kaoru Umemura | 1987-09-29 |
| 4680507 | Liquid metal ion source | Kaoru Uemura, Hifumi Tamura | 1987-07-14 |
| 4624833 | Liquid metal ion source and apparatus | Kaoru Umemura, Toshiyuki Aida, Hifumi Tamura | 1986-11-25 |
| 4567398 | Liquid metal ion source | Hifumi Tamura, Akira Shimase | 1986-01-28 |
| 4560907 | Ion source | Hifumi Tamura, Hiroshi Okano, Akira Shimase | 1985-12-24 |
| 4479060 | Apparatus for irradiation with charged particle beams | Hifumi Tamura, Akira Shimase | 1984-10-23 |
| 4438371 | Source of charged particles beam | Shigeyuki Hosoki, Masaaki Futamoto, Ushio Kawabe, Hifumi Tamura | 1984-03-20 |
| 4233509 | Ion-electron analyzer | Hifumi Tamura | 1980-11-11 |