Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4433228 | Microwave plasma source | Shigeru Nishimatsu, Keizo Suzuki, Noriyuki Sakudo, Ken Ninomiya, Hidemi Koike +2 more | 1984-02-21 |
| 4363953 | Electron beam scribing method | Teiji Katsuta, Koji Nishiwaki | 1982-12-14 |
| 4189641 | Electron microscope | Minoru Shinohara, Shoji Kamimura | 1980-02-19 |