Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5457317 | Electron microscope, a camera for such an electron microscope, and a method of operating such an electron microscope | Katsuhisa Yonehara, Isao Matsui | 1995-10-10 |
| 4363953 | Electron beam scribing method | Koji Nishiwaki, Shinjiro Katagiri | 1982-12-14 |
| 4264822 | Electron beam testing method and apparatus of mask | Yukichi Ueno | 1981-04-28 |