Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4481229 | Method for growing silicon-including film by employing plasma deposition | Keizo Suzuki, Atsushi Hiraiwa, Shigeru Takahashi, Shigeru Nishimatsu, Ken Ninomiya | 1984-11-06 |
| 4462863 | Microwave plasma etching | Shigeru Nishimatsu, Keizo Suzuki, Ken Ninomiya, Ichiro Kanomata, Hiroji Saida | 1984-07-31 |
| 4436581 | Uniform etching of silicon (doped and undoped) utilizing ions | Hiroji Saida, Yoshio Sakai, Shigeru Nishimatsu, Keizo Suzuki | 1984-03-13 |
| 4433228 | Microwave plasma source | Shigeru Nishimatsu, Keizo Suzuki, Noriyuki Sakudo, Ken Ninomiya, Hidemi Koike +2 more | 1984-02-21 |
| 4430138 | Microwave plasma etching apparatus having fan-shaped discharge | Keizo Suzuki, Shigeru Nishimatsu, Ichiro Kanomata | 1984-02-07 |
| 4330384 | Process for plasma etching | Keizo Suzuki, Shigeru Nishimatsu, Ichiro Kanomata | 1982-05-18 |
| 4298419 | Dry etching apparatus | Keizo Suzuki, Shigeru Nishimatsu, Ichiro Kanomata | 1981-11-03 |