Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5536359 | Semiconductor device manufacturing apparatus and method with optical monitoring of state of processing chamber | Hiroki Kawada, Kazue Takahashi, Manabu Edamura, Naoyuki Tamura | 1996-07-16 |
| 5520771 | Microwave plasma processing apparatus | Yoshinao Kawasaki, Kazuaki Ichihashi, Seiichi Watanabe, Makoto Nawata | 1996-05-28 |
| 5276386 | Microwave plasma generating method and apparatus | Seiichi Watanabe, Makoto Nawata, Ryooji Fukuyama, Yutaka Kakehi, Yoshinao Kawasaki | 1994-01-04 |
| 4971651 | Microwave plasma processing method and apparatus | Seiichi Watanabe, Makoto Nawata, Ryooji Fukuyama, Yutaka Kakehi, Keiji Ueyama | 1990-11-20 |