Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6683683 | Defect inspection method and apparatus for silicon wafer | Koji Tomita, Shigeru Matsui, Yoshitaka Kodama, Hitoshi Komuro, Kazuo Takeda | 2004-01-27 |
| 6660148 | Electrophoretic method and electrophoretic instrument therefor | Tomohiro Shoji, Yoshiyuki Okishima, Masaya Kojima | 2003-12-09 |
| 6572752 | Capillary electrophoretic instrument and capillary array assembly | Kazumichi Imai, Masaya Kojima, Satoshi Takahashi, Hiromi Yamashita | 2003-06-03 |
| 6384909 | Defect inspection method and apparatus for silicon wafer | Koji Tomita, Shigeru Matsui, Yoshitaka Kodama, Hitoshi Komuro, Kazuo Takeda | 2002-05-07 |
| 6256092 | Defect inspection apparatus for silicon wafer | Koji Tomita, Shigeru Matsui, Yoshitaka Kodama, Hitoshi Komuro, Kazuo Takeda | 2001-07-03 |
| 6226079 | Defect assessing apparatus and method, and semiconductor manufacturing method | Kazuo Takeda, Makoto Ohkura, Seiichi Isomae, Kyoko Minowa, Shigeru Matsui +2 more | 2001-05-01 |
| 6191849 | Wafer inspecting apparatus | Kazuo Takeda, Shigeru Matsui | 2001-02-20 |
| 6160615 | Surface measurement apparatus for detecting crystal defects of wafer | Shigeru Matsui, Isao Nemoto | 2000-12-12 |
| 6157444 | Defect inspection apparatus for silicon wafer | Koji Tomita, Shigeru Matsui, Hitoshi Komuro, Kazuo Takeda | 2000-12-05 |
| 6108079 | Method for measuring crystal defect and equipment using the same | Kazuo Takeda, Isao Nemoto, Shigeru Matsui, Yoshitaka Kodama | 2000-08-22 |