Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6226079 | Defect assessing apparatus and method, and semiconductor manufacturing method | Kazuo Takeda, Makoto Ohkura, Seiichi Isomae, Muneo Maeshima, Shigeru Matsui +2 more | 2001-05-01 |