Issued Patents All Time
Showing 26–50 of 87 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7235516 | Semiconductor cleaning composition comprising an ethoxylated surfactant | Hitoshi Morinaga, Hideaki Mochizuki | 2007-06-26 |
| 7214454 | Positively photosensitive insulating resin composition and cured object obtained therefrom | Katsumi Inomata, Takashi Nishioka, Masayoshi Suzuki, Shin-ichirou Iwanaga | 2007-05-08 |
| 7089680 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2006-08-15 |
| 6968630 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2005-11-29 |
| 6904699 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2005-06-14 |
| 6886272 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2005-05-03 |
| 6880264 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2005-04-19 |
| 6662465 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2003-12-16 |
| 6655044 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2003-12-02 |
| 6634116 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2003-10-21 |
| 6625899 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2003-09-30 |
| 6588121 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2003-07-08 |
| D473354 | Vacuum processing equipment configuration | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2003-04-15 |
| 6505415 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2003-01-14 |
| 6499229 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2002-12-31 |
| 6490810 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2002-12-10 |
| 6487794 | Substrate changing-over mechanism in vacuum tank | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2002-12-03 |
| 6487793 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2002-12-03 |
| 6487791 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2002-12-03 |
| 6484415 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2002-11-26 |
| 6484414 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2002-11-26 |
| 6473989 | Conveying system for a vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2002-11-05 |
| 6470596 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2002-10-29 |
| 6467186 | Transferring device for a vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2002-10-22 |
| 6467187 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2002-10-22 |