Issued Patents All Time
Showing 76–87 of 87 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5673750 | Vacuum processing method and apparatus | Tsunehiko Tsubone, Naoyuki Tamura, Shigekazu Kato, Kouji Nishihata | 1997-10-07 |
| 5663884 | Multiprocessing apparatus | Kouji Nishihata, Naoyuki Tamura, Shigekazu Kato, Tsunehiko Tsubone | 1997-09-02 |
| 5661913 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 1997-09-02 |
| 5553396 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 1996-09-10 |
| 5457896 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 1995-10-17 |
| 5448470 | Multiprocessing apparatus | Kouji Nishihata, Naoyuki Tamura, Shigekazu Kato, Tsunehiko Tsubone | 1995-09-05 |
| 5445484 | Vacuum processing system | Shigekazu Kato, Naoyuki Tamura, Kouji Nishihata, Tsunehiko Tsubone | 1995-08-29 |
| 5349762 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 1994-09-27 |
| 5320982 | Wafer cooling method and apparatus | Tsunehiko Tsubone, Naoyuki Tamura, Shigekazu Kato, Kouji Nishihata | 1994-06-14 |
| 5314509 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 1994-05-24 |
| 5105173 | Band-pass filter using microstrip lines | — | 1992-04-14 |
| 5078851 | Low-temperature plasma processor | Kouji Nishihata, Shigekazu Kato, Tsunehiko Tsubone, Naoyuki Tamura | 1992-01-07 |