Issued Patents All Time
Showing 51–75 of 87 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6463676 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2002-10-15 |
| 6463678 | Substrate changing-over mechanism in a vaccum tank | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2002-10-15 |
| 6460270 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2002-10-08 |
| 6457253 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2002-10-01 |
| 6451901 | Aqueous dispersion and process for producing the same | Kazuhiko Maekawa, Naohiko Uchiumi, Mamoru Omoda | 2002-09-17 |
| 6446353 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2002-09-10 |
| 6418900 | Air induction system for engine | — | 2002-07-16 |
| D453402 | Vacuum processing equipment configuration | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2002-02-05 |
| 6332280 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2001-12-25 |
| 6330755 | Vacuum processing and operating method | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2001-12-18 |
| 6330756 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2001-12-18 |
| 6314658 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2001-11-13 |
| 6301801 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2001-10-16 |
| 6301802 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2001-10-16 |
| 6263588 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2001-07-24 |
| 6112431 | Vacuum processing and operating method | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2000-09-05 |
| 6108929 | Vacuum processing apparatus | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2000-08-29 |
| 6070341 | Vacuum processing and operating method with wafers, substrates and/or semiconductors | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2000-06-06 |
| 6055740 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2000-05-02 |
| 6044576 | Vacuum processing and operating method using a vacuum chamber | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2000-04-04 |
| 6028147 | Block copolymer, process for producing the same and resin composition of the same | Atsuhisa Ogawa, Kenji Shachi, Kazushige Ishiura | 2000-02-22 |
| 6012235 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 2000-01-11 |
| 5950330 | Vacuum processing apparatus and operating method therefor | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 1999-09-14 |
| 5784799 | Vacuum processing apparatus for substate wafers | Shigekazu Kato, Kouji Nishihata, Tsunehiko Tsubone | 1998-07-28 |
| 5685684 | Vacuum processing system | Shigekazu Kato, Naoyuki Tamura, Kouji Nishihata, Tsunehiko Tsubone, Kenji Nakata +1 more | 1997-11-11 |