Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10269603 | Substrate processing apparatus, gas-purging method, method for manufacturing semiconductor device, and recording medium containing abnormality-processing program | Hiroshi Kotani | 2019-04-23 |
| 8768502 | Substrate processing apparatus and substrate processing system | — | 2014-07-01 |
| 8712568 | Substrate processing apparatus and display method of substrate processing apparatus | — | 2014-04-29 |
| 8417394 | Substrate processing apparatus, semiconductor device manufacturing method and temperature controlling method | Masashi Sugishita, Masaaki Ueno, Tsukasa Iida, Susumu NISHIURA, Masao Aoyama +2 more | 2013-04-09 |
| 8271119 | Substrate processing apparatus and substrate processing system | — | 2012-09-18 |
| 7583264 | Apparatus and program for image generation | Michinari Terada, Daisuke Ogawa | 2009-09-01 |
| 4879118 | Glycyrrhetinic acid-containing plasters | Makoto Senuma, Shigeru Kondoh, Tadamasa Kawase | 1989-11-07 |