Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5046847 | Method for detecting foreign matter and device for realizing same | Toshihiko Nakata, Nobuyuki Akiyama, Yoshihiko Yamuchi, Mitsuyoshi Koizumi | 1991-09-10 |
| 4614427 | Automatic contaminants detection apparatus | Mitsuyoshi Koizumi, Nobuyuki Akiyama, Toshiaki Yachi | 1986-09-30 |
| 4508453 | Pattern detection system | Yasuhiko Hara, Nobuyuki Akiyama, Satoru Fushimi, Nobuhiko Aoki | 1985-04-02 |
| 4423331 | Method and apparatus for inspecting specimen surface | Mitsuyoshi Koizumi, Nobuyuki Akiyama | 1983-12-27 |
| 4362389 | Method and apparatus for projection type mask alignment | Mituyoshi Koizumi, Nobuyuki Akiyama | 1982-12-07 |
| 4242702 | Apparatus for automatically checking external appearance of object | Asahiro Kuni, Nobuyuki Akiyama | 1980-12-30 |