Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10784074 | Charged particle beam apparatus and control method thereof | Yoshihisa Orai, Haruhiko Hatano, Takashi Mizuo | 2020-09-22 |
| 10204761 | Charged particle beam device, electron microscope and sample observation method | Yasuhira Nagakubo, Kazutaka Nimura | 2019-02-12 |
| 8067752 | Semiconductor testing method and semiconductor tester | Tohru Ando, Yasuhiko Nara, Tsutomu Saito, Shinichi Kato | 2011-11-29 |
| 8040146 | Inspection apparatus having a heating mechanism for performing sample temperature regulation | Kouichi Kurosawa, Takeshi Sato, Masaaki Komori | 2011-10-18 |
| 7732791 | Semiconductor testing method and semiconductor tester | Tohru Ando, Yasuhiko Nara, Tsutomu Saito, Shinichi Kato | 2010-06-08 |
| 7663390 | Inspection apparatus and method | Kouichi Kurosawa, Takeshi Sato, Masaaki Komori | 2010-02-16 |