Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6033481 | Plasma processing apparatus | Ken'etsu Yokogawa, Tetsuo Ono, Kazunori Tsujimoto, Masahito Mori, Shinichi Tachi +1 more | 2000-03-07 |
| 5891252 | Plasma processing apparatus | Ken'etsu Yokogawa, Tetsuo Ono, Kazunori Tsujimoto, Masahito Mori, Shinichi Tachi +1 more | 1999-04-06 |
| 5714757 | Surface analyzing method and its apparatus | Kozo Mochiji, Hiroyasu Shichi, Seiji Yamamoto, Satoshi Osabe, Keiichi Kanehori | 1998-02-03 |