Issued Patents All Time
Showing 51–62 of 62 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7515360 | Lens barrel and lens barrel system | Takashi Miyazawa | 2009-04-07 |
| 7473332 | Method for processing semiconductor | Junichi Tanaka, Hiroyuki Kitsunai, Hideyuki Yamamoto, Akira Kagoshima | 2009-01-06 |
| 7343217 | System for monitoring and controlling a semiconductor manufacturing apparatus using prediction model equation | Junichi Tanaka, Hiroyuki Kitsunai, Akira Kagoshima, Hideyuki Yamamoto, Shoji Ikuhara +1 more | 2008-03-11 |
| 7330346 | Etching apparatus, method for measuring self-bias voltage, and method for monitoring etching apparatus | Shoji Ikuhara, Hideyuki Yamamoto, Akira Kagoshima | 2008-02-12 |
| 7166480 | Particle control device and particle control method for vacuum processing apparatus | Akira Kagoshima, Hideyuki Yamamoto, Takeshi Arai, Hiroyuki Nakano | 2007-01-23 |
| 7122096 | Method and apparatus for processing semiconductor | Junichi Tanaka, Hiroyuki Kitsunai, Hideyuki Yamamoto, Akira Kagoshima | 2006-10-17 |
| 7058470 | Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a system therefor | Junichi Tanaka, Hiroyuki Kitsunai, Akira Kagoshima, Hideyuki Yamamoto, Shoji Ikuhara +1 more | 2006-06-06 |
| 6916396 | Etching system and etching method | Akira Kagoshima, Motohiko Yoshigai, Hideyuki Yamamoto, Junichi Tanaka, Kenji Tamaki +1 more | 2005-07-12 |
| 6908529 | Plasma processing apparatus and method | Hideyuki Yamamoto, Akira Kagoshima, Shoji Ikuhara, Junichi Tanaka | 2005-06-21 |
| 6828165 | Semiconductor plasma processing apparatus with first and second processing state monitoring units | Junichi Tanaka, Hiroyuki Kitsunai, Akira Kagoshima, Hideyuki Yamamoto, Shoji Ikuhara +1 more | 2004-12-07 |
| 6706543 | Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a therefor | Junichi Tanaka, Hiroyuki Kitsunai, Akira Kagoshima, Hideyuki Yamamoto, Shoji Ikuhara +1 more | 2004-03-16 |
| 6616759 | Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a system therefor | Junichi Tanaka, Hiroyuki Kitsunai, Akira Kagoshima, Hideyuki Yamamato, Shoji Ikuhara +1 more | 2003-09-09 |