Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8466439 | Electron beam lithography apparatus and electron beam lithography method | Akio Yamada, Hiroshi Yasuda | 2013-06-18 |
| 6344655 | Multicolumn charged-particle beam lithography system | Masami Takigawa | 2002-02-05 |
| 6242751 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Akio Takemoto, Yoshihisa Ooaeh, Tomohiko Abe, Hiroshi Yasuda, Takamasa Satoh +7 more | 2001-06-05 |
| 5969365 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Akio Takemoto, Yoshihisa Ooaeh, Tomohiko Abe, Hiroshi Yasuda, Takamasa Satoh +7 more | 1999-10-19 |
| 5757015 | Charged-particle-beam exposure device and charged-particle-beam exposure method | Akio Takemoto, Yoshihisa Ooaeh, Tomohiko Abe, Hiroshi Yasuda, Takamasa Satoh +7 more | 1998-05-26 |