Issued Patents All Time
Showing 51–58 of 58 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7985700 | Composition for forming insulating film and method for fabricating semiconductor device | Yoshihiro Nakata, Ei Yano | 2011-07-26 |
| 7875981 | Insulating film material, multilayer interconnection structure, method for manufacturing same, and method for manufacturing semiconductor device | Yasushi Kobayashi, Yoshihiro Nakata | 2011-01-25 |
| 7830012 | Material for forming exposure light-blocking film, multilayer interconnection structure and manufacturing method thereof, and semiconductor device | Yoshihiro Nakata | 2010-11-09 |
| 7728065 | Material for forming exposure light-blocking film, multilayer interconnection structure and manufacturing method thereof, and semiconductor device | Yoshihiro Nakata | 2010-06-01 |
| 7655576 | Insulator film, manufacturing method of multilayer wiring device and multilayer wiring device | Yoshihiro Nakata, Ei Yano | 2010-02-02 |
| 7541296 | Method for forming insulating film, method for forming multilayer structure and method for manufacturing semiconductor device | Tamotsu Owada, Hirofumi Watatani, Yoshihiro Nakata, Shun-ichi Fukuyama | 2009-06-02 |
| 7476970 | Composition for forming insulating film and method for fabricating semiconductor device | Yoshihiro Nakata, Ei Yano | 2009-01-13 |
| 7262142 | Semiconductor device fabrication method | Yoshihiro Nakata, Ei Yano | 2007-08-28 |