Issued Patents All Time
Showing 51–64 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5364716 | Pattern exposing method using phase shift and mask used therefor | Masao Kanazawa, Tamae Haruki, Yasuko Tabata | 1994-11-15 |
| 5338647 | Reflection type photomask and reflection type photolithography method comprising a concavo-convex surface | Kenichi Kawashima | 1994-08-16 |
| 5276551 | Reticle with phase-shifters and a method of fabricating the same | — | 1994-01-04 |
| 5190836 | Reflection type photomask with phase shifter | Kenichi Kawashima | 1993-03-02 |
| 5082695 | Method of fabricating an X-ray exposure mask | Masao Yamada, Masafumi Nakaishi, Yuji Furumura, Takashi Eshita, Fumitake Mieno | 1992-01-21 |
| 5004927 | Process for forming a fine pattern having a high aspect ratio | — | 1991-04-02 |
| 4939052 | X-ray exposure mask | — | 1990-07-03 |
| 4881257 | Deformation free X-ray exposure mask for X-ray lithography | — | 1989-11-14 |
| 4767435 | Process for producing transparent glass product having refractive index gradient | Shigeaki Omi, Yoshiyuki Asahara, Seiichi Shingaki, Shin Nakayama, Tetsuro Izumitani +1 more | 1988-08-30 |
| 4678919 | Electron beam exposure method and apparatus | Kenji Sugishima | 1987-07-07 |
| 4643982 | High-strength glass-ceramic containing anorthite crystals and process for producing the same | Toshihiro Kasuga | 1987-02-17 |
| 4624486 | Structure at resin pipe connections | Yoshinori Nishino, Masahiko Yamamoto, Tadayoshi Uda, Tomoyoshi Kanazawa | 1986-11-25 |
| 4560666 | High strength glass-ceramic containing apatite and alkaline earth metal silicate crystals and process for producing the same | Masahiro Yoshida | 1985-12-24 |
| 4391916 | Alkali-free glass for photoetching mask | Isao Masuda | 1983-07-05 |