Issued Patents All Time
Showing 301–325 of 600 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6416586 | Cleaning method | Toshihiro Il, Kenji Mori, Toshikazu Abe, Hirosi Arakawa, Takahisa Nitta | 2002-07-09 |
| 6408879 | Fluid control device | Yukio Minami, Akihiro Morimoto, Nobukazu Ikeda, Keiji Hirao, Takashi Hirose +2 more | 2002-06-25 |
| 6394415 | Fluid control valve and fluid supply/exhaust system | Migaku Takahashi, Michio Yamaji, Tsuyoshi Tanikawa, Nobukazu Ikeda, Ryosuke Dohi +5 more | 2002-05-28 |
| 6378192 | Method of fixing a plurality of lower members each having reference bore for installing upper member, and fixing jigs | Michio Yamaji, Tsutomu Shinohara | 2002-04-30 |
| 6375911 | Method and device for treating exhaust gas | Yoshio Ishihara, Koh Matsumoto, Tetsuya Kimijima | 2002-04-23 |
| 6372646 | Optical article, exposure apparatus or optical system using it, and process for producing it | Kazuyuki Harada, Nobuyoshi Tanaka | 2002-04-16 |
| 6370897 | Semiconductor manufacturing facility | Osamu Suenaga, Sadao Kobayashi | 2002-04-16 |
| 6357385 | Plasma device | Takahisa Nitta, Masaki Hirayama, Haruyuki Takano, Ryu Kaiwara | 2002-03-19 |
| 6349670 | Plasma treatment equipment | Akira Nakano, Koichi Fukuda, Sung-Chul Kim, Yasuhiko Kasama, Shoichi Ono | 2002-02-26 |
| 6350376 | Reductive heat exchange water and heat exchange system using such water | Takashi Imaoka, Hiroshi Morita, Isamu Sugiyama, Masaki Hirayama | 2002-02-26 |
| 6348157 | Cleaning method | Takahisa Nitta, Kazuhiko Kawada, Mitsunori Nakamori, Toshihiro II | 2002-02-19 |
| 6343239 | Transportation method for substrate wafers and transportation apparatus | Masayuki Toda, Yoshio Ishihara | 2002-01-29 |
| 6334120 | Semiconductor arithmetic circuit and data processing device | Tadashi Shibata, Tatsuo Morimoto | 2001-12-25 |
| 6331994 | Excimer laser oscillation apparatus and method, excimer laser exposure apparatus, and laser tube | Nobuyoshi Tanaka, Masaki Hirayama | 2001-12-18 |
| 6325081 | Washing apparatus and washing method | Nobuhiro Miki, Takahisa Nitta, Yasuyuki Harada | 2001-12-04 |
| 6314992 | Fluid-switchable flow rate control system | Satoshi Kagatsume, Jun Hirose, Kouji Nishino | 2001-11-13 |
| 6316813 | Semiconductor device with insulated gate transistor | Mamoru Miyawaki | 2001-11-13 |
| 6312328 | System and method for producing and supplying highly clean dry air | Daiji Nakajima, Yoshio Ishihara | 2001-11-06 |
| 6310505 | Semiconductor integrated circuit, delay-locked loop having the same circuit, self-synchronizing pipeline type system, voltage-controlled oscillator, and phase-locked loop | Katsuhisa Ogawa, Tadashi Shibata | 2001-10-30 |
| 6302130 | Method and apparatus for detection of orifice clogging in pressure-type flow rate controllers | Seiichi Iida, Satoshi Kagatsume, Jun Hirose, Kouji Nishino, Nobukazu Ikeda +7 more | 2001-10-16 |
| 6289923 | Gas supply system equipped with pressure-type flow rate control unit | Satoshi Kagatsume, Nobukazu Ikeda, Kouji Nishino, Kazuhiro Yoshikawa, Eiji Ideta +3 more | 2001-09-18 |
| 6286454 | Plasma process device | Masaki Hirayama, Tatsushi Yamamoto, Takamitsu Tadera | 2001-09-11 |
| 6282221 | Excimer laser oscillation apparatus | Nobuyoshi Tanaka | 2001-08-28 |
| 6274040 | Apparatus for removing electrostatic charge from high resistivity liquid | Kenichi Mitsumori, Yasuhiko Kasama, Akira Nakano, Akira Abe | 2001-08-14 |
| 6273477 | Gasket and pipe joint | Michio Yamaji, Tsutomu Shinohara, Nobukazu Ikeda, Akihiro Morimoto | 2001-08-14 |