| 7727681 |
Electron beam processing for mask repair |
Diane K. Stewart, John Beaty, Christian R. Musil, Steven Berger, Sybren Sijbrandij |
2010-06-01 |
| 7662524 |
Photolithography mask repair |
Diane K. Stewart, John Beaty, Christian R. Musil, Steven Berger |
2010-02-16 |
| 7504182 |
Photolithography mask repair |
Diane K. Stewart, John Beaty, Christian R. Musil, Steven Berger |
2009-03-17 |
| 6753538 |
Electron beam processing |
Christian R. Musil, Thomas J. Gannon, Clive D. Chandler, Xiadong Da |
2004-06-22 |
| 6709554 |
Method and apparatus for repairing lithography masks using a charged particle beam system |
David C. Ferranti, Sharon M. Szelag |
2004-03-23 |
| 6641705 |
Apparatus and method for reducing differential sputter rates |
Michael William Phaneuf, Jian Li, Richard F. Shuman, Kathryn Noll |
2003-11-04 |
| 6322672 |
Method and apparatus for milling copper interconnects in a charged particle beam system |
Richard F. Shuman, Kathryn Noll |
2001-11-27 |
| 6042738 |
Pattern film repair using a focused particle beam system |
Andrew Doyle |
2000-03-28 |
