DS

Diane K. Stewart

FE Fei: 6 patents #94 of 681Top 15%
CG Carl Zeiss Microscopy Gmbh: 1 patents #298 of 564Top 55%
Overall (All Time): #745,671 of 4,157,543Top 20%
7
Patents All Time

Issued Patents All Time

Showing 1–7 of 7 patents

Patent #TitleCo-InventorsDate
10410828 Charged particle beam system and methods Chuong Huynh, Bernhard Goetze, John A. Notte, IV 2019-09-10
8119985 Methods and apparatus for statistical characterization of nano-particles Daniel Rosenthal, Michel Epsztein 2012-02-21
7727681 Electron beam processing for mask repair J. David Casey, Jr., John Beaty, Christian R. Musil, Steven Berger, Sybren Sijbrandij 2010-06-01
7662524 Photolithography mask repair J. David Casey, Jr., John Beaty, Christian R. Musil, Steven Berger 2010-02-16
7544938 Methods and apparatus for statistical characterization of nano-particles Daniel Rosenthal, Michel Epsztein 2009-06-09
7504182 Photolithography mask repair John Beaty, Christian R. Musil, Steven Berger, J. David Casey, Jr. 2009-03-17
6979822 Charged particle beam system W. Ralph Knowles, Brian T. Kimball 2005-12-27