SS

Sharon M. Szelag

FE Fei: 1 patents #375 of 681Top 60%
Overall (All Time): #3,473,759 of 4,157,543Top 85%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
6709554 Method and apparatus for repairing lithography masks using a charged particle beam system David C. Ferranti, J. David Casey, Jr. 2004-03-23