Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6294059 | Substrate plating apparatus | Naoaki Ogure, Hiroaki Inoue, Norio Kimura, Fumio Kuriyama, Manabu Tsujimura +2 more | 2001-09-25 |
| 6269548 | Spin processing apparatus | Hiroyuki Shinozaki, Junichiro Yoshioka, Kazuaki Maeda | 2001-08-07 |
| 6036783 | Liquid material vaporizer apparatus and gas ejection device | Yukio Fukunaga, Takeshi Murakami, Naoaki Ogure | 2000-03-14 |
| 5862605 | Vaporizer apparatus | Kuniaki Horie, Naoaki Ogure, Yukio Fukunaga | 1999-01-26 |
| 5728223 | Reactant gas ejector head and thin-film vapor deposition apparatus | Takeshi Murakami, Noriyuki Takeuchi, Hiroyuki Shinozaki, Kiwamu Tsukamoto, Yukio Fukunaga | 1998-03-17 |