Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12252791 | Apparatus for manufacturing semiconductor device | Yuya Koide, Hirotaka Mori | 2025-03-18 |
| 12188151 | Silicon carbide wafer and method for manufacturing the same | Masatake Nagaya, Junji Ohara, Shinichi Hoshi, Takashi Kanemura | 2025-01-07 |
| 11879171 | Semiconductor manufacturing device | Yuichi Takeuchi | 2024-01-23 |
| 11107892 | SiC epitaxial wafer and method for producing same | Keisuke Fukada, Naoto ISHIBASHI, Akira Bando, Masahiko Ito, Isaho Kamata +7 more | 2021-08-31 |
| 10896831 | Film forming apparatus | Kunihiko Suzuki, Naohisa Ikeya, Keisuke Fukada, Masahiko Ito, Isaho Kamata +6 more | 2021-01-19 |
| 10745824 | Film forming apparatus | Kunihiko Suzuki, Naohisa Ikeya, Masayoshi Yajima, Kazukuni Hara, Hideki Matsuura +1 more | 2020-08-18 |
| 10584417 | Film forming apparatus, susceptor, and film forming method | Hideki Ito, Hidekazu Tsuchida, Isaho Kamata, Masahiko Ito, Masami Naito +2 more | 2020-03-10 |
| 10262863 | Method for manufacturing SiC epitaxial wafer by simultaneously utilizing an N-based gas and a CI-based gas, and SiC epitaxial growth apparatus | Keisuke Fukada, Masahiko Ito, Isaho Kamata, Hidekazu Tsuchida, Hideyuki Uehigashi +4 more | 2019-04-16 |
| 9879359 | Silicon carbide semiconductor film-forming apparatus and film-forming method using the same | Masami Naito, Masahiko Ito, Isaho Kamata, Hidekazu Tsuchida, Hideki Ito +2 more | 2018-01-30 |
| 9873941 | Film-forming manufacturing apparatus and method | Hideki Ito, Toshiro Tsumori, Kunihiko Suzuki, Hidekazu Tsuchida, Isaho Kamata +4 more | 2018-01-23 |
| 9598792 | Film-forming apparatus and film-forming method | Kunihiko Suzuki, Hideki Ito, Naohisa Ikeya, Hidekazu Tsuchida, Isaho Kamata +4 more | 2017-03-21 |
| 9570337 | Film formation apparatus and film formation method | Hideki Ito, Hidekazu Tsuchida, Isaho Kamata, Masahiko Ito, Masami Naito +2 more | 2017-02-14 |
| 9518322 | Film formation apparatus and film formation method | Hideki Ito, Kunihiko Suzuki, Hidekazu Tsuchida, Isaho Kamata, Masahiko Ito +3 more | 2016-12-13 |
| 8704340 | Stacked single crystal compound semiconductor substrates | Masami Naito, Nobuyuki Ooya | 2014-04-22 |
| 8507921 | Single crystal compound semiconductor substrate | Masami Naito, Nobuyuki Ooya | 2013-08-13 |