Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10896831 | Film forming apparatus | Kunihiko Suzuki, Keisuke Fukada, Masahiko Ito, Isaho Kamata, Hidekazu Tsuchida +6 more | 2021-01-19 |
| 10745824 | Film forming apparatus | Kunihiko Suzuki, Masayoshi Yajima, Kazukuni Hara, Hiroaki Fujibayashi, Hideki Matsuura +1 more | 2020-08-18 |
| 10157768 | Substrate processing apparatus, transfer method, and susceptor | Yoshikazu Moriyama, Kunihiko Suzuki | 2018-12-18 |
| 9598792 | Film-forming apparatus and film-forming method | Kunihiko Suzuki, Hideki Ito, Hidekazu Tsuchida, Isaho Kamata, Masahiko Ito +4 more | 2017-03-21 |
| 8008168 | Method and apparatus for manufacturing semiconductor device | Hideki Ito | 2011-08-30 |