Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12356687 | SiC epitaxial wafer and method for manufacturing SiC epitaxial wafer | Naoto ISHIBASHI | 2025-07-08 |
| 12266693 | SiC epitaxial wafer, and method of manufacturing the same | Yoshitaka Nishihara | 2025-04-01 |
| 12166087 | SiC epitaxial wafer and method for manufacturing SIC epitaxial wafer | Naoto ISHIBASHI | 2024-12-10 |
| 11427929 | Wafer supporting mechanism, chemical vapor deposition apparatus, and epitaxial wafer manufacturing method | Jia YU, Naoto ISHIBASHI, Tomoya Utashiro, Hironori Atsumi | 2022-08-30 |
| 11424147 | Deposition apparatus having particular arrangement of raw material supply port, partition plate, and opening for measuring a temperature | Naoto ISHIBASHI, Hironori Atsumi | 2022-08-23 |
| 11107892 | SiC epitaxial wafer and method for producing same | Naoto ISHIBASHI, Akira Bando, Masahiko Ito, Isaho Kamata, Hidekazu Tsuchida +7 more | 2021-08-31 |
| 10896831 | Film forming apparatus | Kunihiko Suzuki, Naohisa Ikeya, Masahiko Ito, Isaho Kamata, Hidekazu Tsuchida +6 more | 2021-01-19 |
| 10801128 | SiC epitaxial growth apparatus | Yasunori Motoyama, Yoshishige OKUNO, Yoshikazu Umeta | 2020-10-13 |
| 10262863 | Method for manufacturing SiC epitaxial wafer by simultaneously utilizing an N-based gas and a CI-based gas, and SiC epitaxial growth apparatus | Masahiko Ito, Isaho Kamata, Hidekazu Tsuchida, Hideyuki Uehigashi, Hiroaki Fujibayashi +4 more | 2019-04-16 |
| 9184669 | Power supply apparatus | Yasuyuki Tsutsui, Mitsuru Imoto, Norio Sakae, Kouji Joutaki, Tetsuo Shouji | 2015-11-10 |