Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12188152 | SiC epitaxial wafer and method of manufacturing SiC epitaxial wafer preliminary class | Kensho TANAKA | 2025-01-07 |
| 11795577 | SiC epitaxial wafer and method of manufacturing SiC epitaxial wafer | Kensho TANAKA | 2023-10-24 |
| 11692266 | SiC chemical vapor deposition apparatus | Yoshishige OKUNO, Rimpei Kindaichi | 2023-07-04 |
| 11390949 | SiC chemical vapor deposition apparatus and method of manufacturing SiC epitaxial wafer | Hironori Atsumi | 2022-07-19 |
| 11326275 | SiC epitaxial growth apparatus having purge gas supply ports which surround a vicinity of a raw material gas supply port | Hironori Atsumi | 2022-05-10 |
| 10801128 | SiC epitaxial growth apparatus | Yasunori Motoyama, Yoshishige OKUNO, Keisuke Fukada | 2020-10-13 |