Issued Patents All Time
Showing 1–25 of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12297562 | Silicon carbide ingot including screw dislocations | Isaho Kamata, Norihiro HOSHINO, Kiyoshi BETSUYAKU, Takeshi Okamoto, Akiyoshi HORIAI | 2025-05-13 |
| 12281410 | Method and apparatus for manufacturing silicon carbide single crystal, and silicon carbide single crystal ingot | Norihiro HOSHINO, Isaho Kamata, Takahiro KANDA, Takeshi Okamoto | 2025-04-22 |
| 12252808 | Silicon carbide single crystal wafer, and methods for manufacturing silicon carbide single crystal ingot and the silicon carbide single crystal wafer | Isaho Kamata, Norihiro HOSHINO, Yuichiro Tokuda, Takeshi Okamoto | 2025-03-18 |
| 12249625 | Silicon carbide semiconductor device and method of manufacturing silicon carbide semiconductor device | Takeshi Tawara, Tomonori Mizushima, Shinichiro Matsunaga, Kensuke Takenaka, Manabu Takei +6 more | 2025-03-11 |
| 12071709 | Methods for manufacturing silicon carbide single crystal ingot and silicon carbide single crystal wafer | Isaho Kamata, Norihiro HOSHINO, Yuichiro Tokuda, Takeshi Okamoto | 2024-08-27 |
| 11948976 | Vertical MOSFET having trench gate structure containing silicon carbide | Takeshi Tawara, Koichi Murata | 2024-04-02 |
| 11906569 | Semiconductor wafer evaluation apparatus and semiconductor wafer manufacturing method | Koichi Murata, Isaho Kamata, Akira Miyasaka | 2024-02-20 |
| 11846040 | Silicon carbide single crystal | Yuichiro Tokuda, Hideyuki Uehigashi, Norihiro HOSHINO, Isaho Kamata | 2023-12-19 |
| 11600538 | SiC epitaxial wafer and method for producing SiC epitaxial wafer | Naoto ISHIBASHI, Koichi Murata | 2023-03-07 |
| 11183590 | Semiconductor device and method of manufacturing semiconductor device | Tae Tawara, Shinji Fujikake, Aki TAKIGAWA, Koichi Murata | 2021-11-23 |
| 11107892 | SiC epitaxial wafer and method for producing same | Keisuke Fukada, Naoto ISHIBASHI, Akira Bando, Masahiko Ito, Isaho Kamata +7 more | 2021-08-31 |
| 10896831 | Film forming apparatus | Kunihiko Suzuki, Naohisa Ikeya, Keisuke Fukada, Masahiko Ito, Isaho Kamata +6 more | 2021-01-19 |
| 10868122 | Silicon carbide semiconductor device and a method of manufacturing the silicon carbide semiconductor device | Takeshi Tawara, Koji Nakayama, Yoshiyuki Yonezawa, Koichi Murata | 2020-12-15 |
| 10748763 | Silicon carbide semiconductor substrate, method of manufacturing a silicon carbide semiconductor device, and silicon carbide semiconductor device | Takeshi Tawara, Tetsuya Miyazawa | 2020-08-18 |
| 10665681 | Silicon carbide semiconductor device and method of manufacturing silicon carbide semiconductor device | Takeshi Tawara, Koichi Murata | 2020-05-26 |
| 10584417 | Film forming apparatus, susceptor, and film forming method | Hideki Ito, Isaho Kamata, Masahiko Ito, Masami Naito, Hiroaki Fujibayashi +2 more | 2020-03-10 |
| 10522667 | Silicon carbide epitaxial wafer, silicon carbide insulated gate bipolar transistor, and method of manufacturing the same | Takeshi Tawara, Koichi Murata | 2019-12-31 |
| 10453924 | Silicon carbide semiconductor substrate, method of manufacturing silicon carbide semiconductor substrate, semiconductor device and method of manufacturing semiconductor device | Takeshi Tawara, Tetsuya Miyazawa | 2019-10-22 |
| 10354867 | Epitaxial wafer manufacturing method, epitaxial wafer, semiconductor device manufacturing method, and semiconductor device | Tetsuya Miyazawa, Yoshiyuki Yonezawa, Tomohisa Kato, Kazutoshi Kojima, Takeshi Tawara +1 more | 2019-07-16 |
| 10262863 | Method for manufacturing SiC epitaxial wafer by simultaneously utilizing an N-based gas and a CI-based gas, and SiC epitaxial growth apparatus | Keisuke Fukada, Masahiko Ito, Isaho Kamata, Hideyuki Uehigashi, Hiroaki Fujibayashi +4 more | 2019-04-16 |
| 10181517 | Silicon carbide single crystal, silicon carbide single crystal wafer, silicon carbide single crystal epitaxial wafer, and electronic device | Takeshi Okamoto, Hiroyuki Kondo, Takashi Kanemura, Shinichiro Miyahara, Yasuhiro Ebihara +3 more | 2019-01-15 |
| 9879359 | Silicon carbide semiconductor film-forming apparatus and film-forming method using the same | Hiroaki Fujibayashi, Masami Naito, Masahiko Ito, Isaho Kamata, Hideki Ito +2 more | 2018-01-30 |
| 9873941 | Film-forming manufacturing apparatus and method | Hideki Ito, Toshiro Tsumori, Kunihiko Suzuki, Isaho Kamata, Masahiko Ito +4 more | 2018-01-23 |
| 9598792 | Film-forming apparatus and film-forming method | Kunihiko Suzuki, Hideki Ito, Naohisa Ikeya, Isaho Kamata, Masahiko Ito +4 more | 2017-03-21 |
| 9570337 | Film formation apparatus and film formation method | Hideki Ito, Isaho Kamata, Masahiko Ito, Masami Naito, Hiroaki Fujibayashi +2 more | 2017-02-14 |