Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6998580 | Thermal processing apparatus and thermal processing method | Yasuhiro Imaoka, Hiromi Murayama, Norio Yamamoto, Naoto Mori, Yoko Yoshihara | 2006-02-14 |
| 6885815 | Thermal processing apparatus performing irradiating a substrate with light | Yuko Ikumi | 2005-04-26 |
| 6859616 | Apparatus for and method of heat treatment by light irradiation | Tsutomu Ueyama | 2005-02-22 |
| 6856762 | Light irradiation type thermal processing apparatus | Hiromi Murayama, Yasuhiro Imaoka | 2005-02-15 |
| 6843202 | Thermal processing apparatus for substrate employing photoirradiation | — | 2005-01-18 |
| 6037781 | Measurement of electrical characteristics of semiconductor wafer | Motohiro Kono | 2000-03-14 |
| 5635410 | Bias temperature treatment method | — | 1997-06-03 |
| 5568252 | Method and apparatus for measuring insulation film thickness of semiconductor wafer | Motohiro Kouno, Ikuyoshi Nakatani, Sadao Hirae | 1996-10-22 |
| 4723068 | Electric power control device in an automatic temperature adjusting apparatus | — | 1988-02-02 |
| 4674860 | Image transfer device | Hiroshi Tokunaga, Shinobu Soma, Naoki Aoki | 1987-06-23 |