Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8999864 | Silicon wafer and method for heat-treating silicon wafer | Takeshi Senda, Eiji Toyoda, Koji Araki, Tatsuhiko Aoki, Haruo Sudo +4 more | 2015-04-07 |
| 8936679 | Single crystal pulling-up apparatus of pulling-up silicon single crystal and single crystal pulling-up method of pulling-up silicon single crystal | Hironori Banba, Yoshiaki Abe, Takashi Ishikawa, Shingo Narimatsu, Jun Nakao +2 more | 2015-01-20 |
| 8476149 | Method of manufacturing single crystal silicon wafer from ingot grown by Czocharlski process with rapid heating/cooling process | Takeshi Senda, Eiji Toyoda, Kumiko Murayama, Koji Izunome, Susumu Maeda +7 more | 2013-07-02 |
| 8399341 | Method for heat treating a silicon wafer | Takeshi Senda, Eiji Toyoda, Kumiko Murayama, Koji Araki, Tatsuhiko Aoki +4 more | 2013-03-19 |
| 8252700 | Method of heat treating silicon wafer | Takeshi Senda, Eiji Toyoda, Kumiko Murayama, Koji Araki, Tatsuhiko Aoki +4 more | 2012-08-28 |
| 7977219 | Manufacturing method for silicon wafer | Takeshi Senda, Eiji Toyoda, Kumiko Murayama, Koji Izunome, Susumu Maeda +1 more | 2011-07-12 |
| 7149341 | Wafer inspection apparatus | Yoshinori Hayashi, Hiroyuki Naraidate, Hiroaki Yuda, Atsushi Tanabe, Koji Izunome | 2006-12-12 |
| 6976908 | Polishing head and polishing apparatus | Takayuki Masunaga, Shinobu Oofuchi, Katsuyoshi Kojima | 2005-12-20 |
| 6668662 | Viscoelasticity measuring device | Katsuyoshi Kojima, Takayuki Masunaga | 2003-12-30 |